전자빔과 열을 이용한 증착기 시스템
Submitted by rnd_admin on Tue, 10/22/2024 - 00:10
ename_ko:
전자빔과 열을 이용한 증착기 시스템
ename_en:
E-beam Evaporator
emodel:
KVET-IM2002L
institution:
응용물리연구소
location:
관악 자연과학대학
(19동 420호)
epname:
김영찬
tel:
02-871-7104
email:
kyc1607@snu.ac.kr
link:
https://iap.snu.ac.kr/equipment/list?cateidx=19
keyword:
Deposition source (metal) : Ti, Pt, Au, Cr (Available material : Al)
- Wafer size : 4“ 이내
- Substrate rotation : 0 ~ 30 RPM
- Process chamber : SUS304 / front door type
- loadlock chamber & Automatic sample transfer device
- Vacuum pumping station : Cryo pump & Dry pump
- E-beam source : 4 pocket 7cc crucible / 270 degree deflection
- Thermal source : Not used
- Ultimate Pressure : < 3.0E-8Torr
- System Control : PLC based PC auto
code:
iap19_ebeam