산화물 나노패턴 식각장치
Submitted by rnd_admin on Tue, 10/22/2024 - 00:10
ename_ko:
산화물 나노패턴 식각장치
ename_en:
RIE
emodel:
RIE-200ip
institution:
응용물리연구소
location:
관악 자연과학대학
(19동 420호)
epname:
김영찬
tel:
02-871-7104
email:
kyc1607@snu.ac.kr
link:
https://iap.snu.ac.kr/equipment/list?cateidx=19
keyword:
1. Main Chamber
- Plasma source type : Parallel plate plasma (CCP)
- RF power supply : 13.56 MHz, 600W, Automatic matching
- Vac. Chamber : aluminum chamber, anti-corrosion treated surface
- RIE platen : water cooled, for Φ6“
2. Loadlock Chamber
- aluminum chamber with view port
- direct sample transfer under vacuum
3. Pumping system
- Main chamber : low vacuum gauge and wide range gauge
- Loadlock chamber : low vacuum gauge
- Turbo molecular pump (300L/sec) backed up with mechanical pump (1000L/sec)
- Base pressure : 1.0E-7Torr
4. Gas distribution system
- Mass Flow controller (MFC) : BCl3, CF4, Ar, O2
5. Control system
- Safety interlocked
- pressure, self bias, RF power, Turbo speed and valve, and MFC status displays
code:
iap19_rie