이온 밀링 시스템
Submitted by rnd_admin on Tue, 10/22/2024 - 00:10
ename_ko:
이온 밀링 시스템
ename_en:
Ion Miller
emodel:
KVET-IM2000L
institution:
응용물리연구소
location:
관악 자연과학관2
(19동 420호)
epname:
김영찬
tel:
02-871-7104
email:
kyc1607@snu.ac.kr
link:
https://iap.snu.ac.kr/equipment/list?cateidx=19
keyword:
Ethcing source : O2, Ar
- Etching uniformity : < ±5%
- Wafer size : 2.5“ 이내
- Etching Speed : 0.75 ~ 10Å/sec@Ta (탄탈륨)
- Loadlock chamber System
- Ultimate Pressure : <2.3E-6Torr
code:
iap19_ion miller