플라즈마 애셔
Submitted by rnd_admin on Tue, 10/22/2024 - 00:10
ename_ko:
플라즈마 애셔
ename_en:
Plasma Asher
emodel:
AP-200 Plasma System
institution:
응용물리연구소
location:
관악 자연과학관2
(19동 420호)
epname:
김영찬
tel:
02-871-7104
email:
kyc1607@snu.ac.kr
link:
https://iap.snu.ac.kr/equipment/list?cateidx=19
keyword:
- Plasma 본체 (Main body) 1set, Accessories 1set, Dry pump 1대, RF generator
- Equipment Size : 569W × 869D × 704H mm
- Touch Screen & GUI
- 13.56 MHz Generator
- Ethcing source : O2, Ar
- Mass Flow Controller : 4
code:
iap19_plasma asher