고속 고분해능 분광 엘립소미터
Submitted by rnd_admin on Tue, 10/22/2024 - 00:10
ename_ko:
고속 고분해능 분광 엘립소미터
ename_en:
Ellipsometer (UV, VIS, NIR)
emodel:
M2000DI
institution:
응용물리연구소
location:
관악 자연과학관2
(19동 402호)
epname:
송인경
tel:
02-6415-7783
email:
iksong@snu.ac.kr
link:
https://iap.snu.ac.kr/equipment/list?cateidx=19
keyword:
- Ellipsometer configuration : Dual RCE
- Wavelength range : 193-1690 nm
- Number of wavelengths : 690 wavelengths
- Detector : CCD
- Angles of incidence : 45°-90° (Automated angle base) : 20°-90° (Vertical automated angle base) : ~65° (Focused base) : 65° (Fixed angle base) : 65° (Test base)
- Data acquisition rate : 0.05 seconds (2-5 seconds is typical)
- Max substrate thickness : 18 mm
code:
iap19_ellipsometer