전계방출형 주사전자현미경
Submitted by rnd_admin on Tue, 10/22/2024 - 00:10
ename_ko:
전계방출형 주사전자현미경
ename_en:
FE-SEM
emodel:
JSM-7600F
institution:
신소재공동연구소
location:
관악 신소재공동연구소
(37동 113호)
epname:
이재연
tel:
02-880-4087
email:
jy216@snu.ac.kr
link:
https://riam.snu.ac.kr/sub.php?code=ZESrM6&dong=&mode=view&serial=76
keyword:
· Resolution
1) 1.0 nm at 15 kV
2) 1.5 nm at 1 kV
· Voltage range : 0.1 ~ 30kV
· Maximum image size : 5,120 x 3,840 pixels
· Probe current : 1pA ~ 200nA
· Tilt : -5 ~ 70°
· Rotation : 360°
· Working Distance : 1.5 ~ 25 mm
· Selected detection modes
1) Chamber SE detection for sample topography
2) In-Lens SE detection for high resolution surface imaging
3) Energy dispersive X-ray detector
4) Gentle Beam enables top-surface imaging of a specimen at very low energies of several hundred eV
code:
riam_SEM10